MASS FLOWMETER - GASKORREKTUR-TABELLE
Pos.# | GCF | Symbol | Gas |
0 | 1.00 | Customer | |
1 | x.xx | User | Special Gas Mixture |
2 | 1.00 | Air | Luft |
3 | 0.73 | NH3 | Ammonia |
4 | 1.45 | Ar | Argon |
5 | 0.67 | AsH3 | Arsine |
6 | 0.41 | BCl3 | Boron Trichloride |
7 | 0.81 | Br2 | Bromine |
8 | 0.74 | CO2 | Carbon Dioxide |
9 | 1.00 | CO | Carbon Monoxide |
10 | 0.31 | CCl4 | Carbon Tetrachloride |
11 | 0.42 | CF4 | Carbon Tetrafluoride-Freon 14 |
12 | 0.86 | Cl2 | Chlorine |
13 | 0.46 | CHClF2 | Freon 21 |
14 | 0.24 | C2ClF5 | Freon 115 |
15 | 0.38 | CClF3 | Chlorotrifluormethan-Freon 13 |
16 | 0.61 | C2N2 | Cyanogen |
17 | 1.00 | D2 | Deuterium |
18 | 0.44 | B2H6 | Diborane |
19 | 0.19 | CBr2F2 | Dibromodifluoromethane |
20 | 0.35 | CCl2F2 | Diclorodifluoromethane |
21 | 0.42 | CHCl2F | Diclorofluoromethane |
22 | 0.25 | C2H6SiCl2 | Dicloromethylsilane |
23 | 0.40 | SiH2Cl2 | Diclorosilane |
24 | 0.22 | C2Cl2F4 | Diclorotetrafluoroethane |
25 | 0.43 | C2H2F2 | Difluoroethylene |
26 | 0.22 | C5H12 | Dimethylpropan |
27 | 0.50 | C2H6 | Ethane |
28 | 0.98 | F2 | Fluorine |
29 | 0.50 | CHF3 | Fluoroform - Freon 23 |
30 | 0.33 | CCl3F | Freon 11 |
31 | 0.35 | CCl2F2 | Freon 12 |
32 | 0.38 | CClF3 | Freon 13 |
33 | 0.37 | CBrF3 | Freon 13 B1 |
34 | 0.42 | CF4 | Freon 14 |
35 | 0.42 | CHCl2F | Freon 21 |
36 | 0.46 | CHClF2 | Freon 22 |
37 | 0.50 | CHF3 | Freon 23 |
38 | 0.20 | C2Cl3F3 | Freon 113 |
39 | 0.22 | C2Cl2F4 | Freon 114 |
40 | 0.24 | C2ClF5 | Freon 115 |
41 | 0.24 | C2F6 | Freon 116 |
42 | 0.17 | C4F8 | Freon C318 |
43 | 0.43 | C2H2F2 | Freon 1132A |
44 | 1.45 | He | Helium |
45 | 0.24 | C2F6 | Hexafluoroethane-Freon 116 |
46 | 1.01 | H2 | Hydrogen |
47 | 1.00 | HBr | Hydrogen Bromide |
48 | 1.00 | HCl | Hydrogen Chloride |
49 | 1.00 | HF | Hydrogen Fluoride |
50 | 0.29 | C4H8 | Isobutylene |
51 | 1.54 | Kr | Krypton |
52 | 0.72 | CH4 | Methane |
53 | 0.56 | CH3F | Methyl Fluoride |
54 | 0.21 | MoF6 | Molybdenum Hexafluoride |
55 | 1.46 | Ne | Neon |
56 | 0.99 | NO | Nitric Oxide |
57 | 1.00 | N2 | Nitrogen |
58 | 0.74 | NO2 | Nitrogen Dioxide |
59 | 0.48 | NF3 | Nitrogen Trifluoride |
60 | 0.71 | N2O | Nitrous Oxide |
61 | 0.17 | C4F8 | Octofluorocyclobutane |
62 | 1.00 | O2 | Oxygen |
63 | 0.21 | C5H12 | Pentane |
64 | 0.17 | C3F8 | Perfluoropropane |
65 | 0.44 | COCl2 | Phosgene |
66 | 0.76 | PH3 | Phosphine |
67 | 0.36 | C3H8 | Propane |
68 | 0.41 | C3H6 | Propylene |
69 | 0.60 | SiH4 | Silane |
70 | 0.28 | SiCl4 | Silicon Tetrachloride |
71 | 0.35 | SiF4 | Silicon Tetrafluoride |
72 | 0.69 | SO2 | Sulfur Dioxide |
73 | 0.26 | SF6 | Sulfur Hexafluoride |
74 | 0.33 | CCl3F | Trichlorofluoromethane |
75 | 0.33 | SiHCl3 | Trichlorosilane |
76 | 0.25 | WF6 | Tungsten Hexafluoride |
77 | 1.32 | Xe | Xenon |